Spectral Characteristic Verification of Multi-wavelength Evanescent Light Optical System set up with Pellin-Broca Prism

Abstract

Although it is possible to measure the height of nano-particles near the surface using multi-wavelength evanescent light optical system, conventional optical system can only observe two wavelengths using such as dichroic mirrors. Using an optical system that is not limited to the number of wave-length or certain wavelength, has the advantage of being able to measure height with higher accuracy. In this paper, we propose spectroscopic method of multi-wavelength evanescent light using a Pellin-Broca prism and verify the spectral performance of the prism. This turns out to be approximately 0.25 nm/pixel.