Niモールドへの固溶を用いたダイヤモンドのマイクロパターニング

松前 貴司; 西森 弘明; 倉島 優一; 高木 秀樹

doi:10.11522/pscjspe.2024S.0_628

2024 JSPE Spring Conference

DOI https://doi.org/10.11522/pscjspe.2024S.0_628

Conference information

Host: The Japan Society for Precision Engineering

Name : 2024 JSPE Spring Conference

Location : [in Japanese]

Date : March 12, 2024 - March 14, 2024

Micro-patterning of diamond substrates using Ni molds

*Takashi Matsumae, Hiroaki Nishimori, Yuichi Kurashima, Hideki Takagi

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Keywords: Diamond, Micro-pattering, Ni mold

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 628-629

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Abstract

We have developed a micro-fabrication method of diamond substrate with Ni molds. Diamond substrate was etched by compression of Ni molds at high temperatures.

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