Proceedings of JSPE Semestrial Meeting
2024 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2024 JSPE Spring Conference

Location : [in Japanese]

Date : March 12, 2024 - March 14, 2024

[title in Japanese]
*Shoya Fukuda, Soya Sato, Takeru Sato, Tsunehisa Suzuki, Tatsuya Fujii, Mitsuyoshi Nomura, Takashi Sekine, Yasushi Sugawara, Shigeaki Sugiyama
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Keywords: Ion beam assisted deposition, Deposition rate, CrN thin film
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 674-675

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[in Japanese]
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© 2024 The Japan Society for Precision Engineering
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