Study of Functionality Evaluation for Multilayer Thin Films on Cemented Carbides 2.減圧熱CVD法の概要

Abstract

The performance of multilayer (TiC-TiCN-TiN) thin films applied to cemented carbide tools for plastic working is conventionally evaluated through life tests under working conditions, but these life tests take time and are expensive. To find a more efficient way to evaluate the films, an ideal thin film was explicitly defined and two basic functions were examined: friction as a function of load,and indentation area as a function of load. As a result, when the indentation area versus load characteristic was standardized against a competing product having a high reputation in the field, the signal-to-noise ratio had a reproducible gain, which allowed thin-film performance to be evaluated more efficiently.