圧電ダイアフラムの変形の有限要素解析による最適化

抄録

This paper reports a study to optimize a structure of piezoelectric actuated diaphragm by using non-linear FEM (Finite Elements Method). We have conducted the research on the piezoelectric actuators in our products. A compounded noise factor was used, which resulted in a good reproducibility of conclusions. An external pressure, users' environmental noise, was adopted because we suppose that the piezoelectric actuated device is used in harsh environment. This noise was effective and helpful. A gain of 12 decibels on S/N ratio was accomplished; standard deviation has decreased one fourth. Also a gain of 13 decibels on sensitivity was accomplished, β has increased four times. We understood that it became possible to vary sensitivity by 6 decibels without affecting S/N ratio.