6. Analysis of Lattice Distortion in As-grown Silicon Single Crystals by Plane-wave X-Ray Topography Using Imaging Plates
Keywords:
plane-wave X-ray topography,
imaging plate (IP),
as-grown silicon single crystal,
lattice distortion,
lattice plane spacing,
lattice plane orientation,
grown-in defect
1998 Volume 47 Issue 8 Pages 648-655
Details
Article 1st page
