Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
MEMS Technology for Giga Hertz Applications
Koichi IMANAKA
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Keywords: MEMS, RF, GHz, SWITCH, RELAY
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2003 Volume 54 Issue 10 Pages 650-654

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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