Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Notes
Copper Plating Using Gel Electrolyte
III. Electrodeposition of Copper from Thin Film of Gel Electrolyte
Masayuki ITAGAKIKen-ichi SHIMODAKunihiro WATANABEKazuya YASUDA
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2003 Volume 54 Issue 10 Pages 717-720

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Abstract

The electroplating of copper has been done by using a thin film of gel electrolyte. The electrochemical behavior of the copper plating cell was investigated by electrochemical methods involving an impedance method. The current efficiencies of both copper deposition and copper counter electrode dissolution did not depend on the thickness of the gel electrolyte. It was confirmed that the copper plating could be accomplished using a gel electrolyte of 1mm thickness. The cell voltage increases due to solution resistance with the increase of gel electrolyte thickness. Therefore, decrease of electrical power requirement and minimization of the plating cell can be expected by electroplating using a thin gel electrolyte.

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© 2003 by The Surface Finishing Society of Japan
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