Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Letters
Influence of Deposition Conditions on the Nanoindentation Hardness and the Structure of DLC Films Prepared by Ionization Deposition Method
Tsuyoshi MANO, Yoshio SHIBUYA, Osamu SUGIYAMA, Hiroshi NAKAYAMA, Osamu TAKAI
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Keywords: Ionization Deposition, DLC, Nanoindentation Hardness, Bias Voltage, Anodic Current
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2003 Volume 54 Issue 8 Pages 545-546

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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