Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
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Plasma Technologies for Meters-scale Large-Area Processes
Yuichi SETSUHARA, Akinori EBE
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Keywords: Plasma Processing, Large Area, Power Deposition Profile, Inductively Coupled Plasma
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2005 Volume 56 Issue 5 Pages 268

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Journal of the Metal Finishing Society of Japan

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Jitsumu Hyomen Gijutsu

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