Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
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Chemical Deposition of Thin Films from Supercritical Fluids
—What Bring about Good Conformability and Narrow Gap-Fill Capability? —
Eiichi KONDOH
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Keywords: Supercritical Fluid, Carbon Dioxide, Copper, Ruthenium, Conformability
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2010 Volume 61 Issue 8 Pages 566

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