Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
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Effects of Supercritical Carbon Dioxide on Adhesive Strength of Microsized Photoresist Patterns in Photolithography
Chiemi ISHIYAMA
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Keywords: Supercritical Carbon Dioxide, Adhesive Strength, SU-8, MEMS
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2010 Volume 61 Issue 8 Pages 571

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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