Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
Notes
Effect of Metal Nanorod Length on Adhesion of Electrolessly Plated Film on Silicon
Masato ENOMOTOShinji YAESusumu SAKAMOTONaoki FUKUMUROHitoshi MATSUDA
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2013 Volume 64 Issue 12 Pages 682-684

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Abstract
For the direct electroless deposition of adhesive metal films on Si substrates, we have developed a surface-activation process that forms metal nanorods in Si using electroless displacement metal nanoparticle deposition, metal-nanoparticle-assisted HF etching of Si, and autocatalytic electroless Ni deposition. The metal film adhesion increases with the metal nanorod length.
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© 2013 by The Surface Finishing Society of Japan
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