抄録
The effects of process parameters on the formation of titanium nitride and the properties of the coatings (such as hardness, morphology, crystal structure and wear resistance) have been investigated. Titanium nitride coatings were deposited on high speed steel substrates by a reactive ion-plating technique using a probe biased to positive potential. By means of charging positive potential to the probe, a reactive zone was produced above the molten titanium pool and the reaction between titanium and nitrogen was accelerated. Knoop hardness of the titanium nitride coatings formed under the condition such as probe current of 150mA, nitrogen partial pressure of 9.3×10-2Pa and substrate temperature of 500°C, was approximately Hk 1750 with 10g load for 5μm film thickness. Titanium coatings on high speed steel showed an excellent wear resistance as compared with uncoated materials as-heat treated.
