HCD (Hollow Cathode Discharge) 法による窒化チタン膜の色彩

抄録

Titanium nitride has very high hardness and resistivity to corrosion and abrasion, and its color is very similar to that of gold. However, little quantitative work has been done on the colors of titanium nitride films. Present paper aims at the quantitative evalution of the colors of titanium nitride films prepared by the hollow cathode discharge (HCD) process, and color changes due to variations in Hue as a function of nitrogen partial pressure. A comparison is also made between the golden color of such films and gold films prepared by the electroplating. An integrating sphere with specular cap was used as the optical instrument and CIE chromaticity coordinates as befined by JIS Z 8701 and the Munsell renotation system as befined by JIS Z 8721 were employed to indicate film color. The titanium nitride films showed 2Y-3.5Y for hue, 7-7.5 for value and 3.5-7 for chroma by Munsell renotation, while the gold films showed 2Y-7.5Y for hue, 8-8.5 for value and 2-6 for chroma. Comparing the golden color of the two films, the titanium nitride films were a little lower in color value, but since they are much higer in hardness, they show an extensive potential for decorative applications.