CVD法による各種金属上へのモリブデンコーティング
ニッケル, 軟鉄, 銅, SUSへのコーティング
1988 年 39 巻 11 号 p. 710-716
詳細
1988 年 39 巻 11 号 p. 710-716
Molibdenum coatings having a thickness of 5-30μm were chemically deposited on 10×13×0.5mm substrates of nickel, iron, copper and 18-8 stainless steel for 60 minutes, using the following CVD reaction;
2MoCl5(g)+5H2(g)→2Mo(s)+10HCl(g)……(1)
The molybdenum coatings on nickel substrates were obtained at 550-750°C and resisted peeling even under a thermal shock of 600-700°C. A diffusion layer 3-10μm thick was observed at the interface between the molybdenum and the nickel substrate. Examination using a micro X-ray diffraction meter showed that the compound MoNi4 formed in the diffusion layer.
Molybdenum coatings were also deposited on iron substrates at 750-800°C, on copper at 550-650°C, and on 18-8 stainless steel at 550-750°C. The molybdenum coatings on iron and copper were thicker than those on nickl. A diffusion layer was observed between molybdenum and each of the substrates.
The use of nickel-plated iron substrates made it possible to obtain molybdenum coatings on iron substrates at temperatures as low as 550°C.
