Journal of The Surface Finishing Society of Japan
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
The Carrier Generation Mechanism of ITO Films Prepared by the Reactive Sputtering from Oxide Targets
Koji NAKANISHI
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Keywords: ITO, Indium Tin Oxide, Conduction Mechanism, DC Sputtering
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1992 Volume 43 Issue 2 Pages 98-102

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Journal of the Metal Finishing Society of Japan

Genba Panfuretto

Jitsumu Hyomen Gijutsu

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