2002 Volume 27 Issue 84 Pages 25-30
A method using gas chromatograph-mass spectrometry (GC-MS) combined with preconcentration by adsorption with activated carbon sampling tube has been developed for the simultaneous determination of phthalate esters and low molecular weight siloxanes in the clean room air. Calibrating materials are dibutyl-phthalate (DBP) and di-2-ethylhexylphthalate (DEHP) for analysis of phthalate esters, and dimer, cyclic oligomers from trimer to hexamer for siloxane analysis. Calibration ranges for phthalate esters and siloxanes are 0-2000ng/m^3 and 0-10000ng/m^3 respectively. Determinants are concentrated by sampling tube with suction of sample air 0.7L/min of flow rate for 24h, and extracted with carbon disulfide containing 1vol% of methanol. One μL of extract was injected into a GC-MS for analysis. The determination limits of determinants were 0.2μg/m^3 for 2 phthalate esters and 0.03μg/m^3 for 5 siloxanes, respectively. The analytical results for the air in six newly built clean room were less than the determination limits for phthalate esters. For siloxanes, 0.2μg/m^3 was obtained when silicone sealant of low siloxane type was used, and 3.1μg/m^3 for normal type silicon sealant.
