遷移金属非酸化物の材料開発
1984 年 100 巻 1152 号 p. 187-194
詳細
1984 年 100 巻 1152 号 p. 187-194
The preparations (thin film, whisker, fine powder, sintered body and single crystal) of transition metal carbides, nitrides and diborides, electrical, superconductive, mechanical and oxidation resistance characteristics, and practical applications of these compounds are reviewed from the standpoints of material science. These refractory compounds are promising candidate materials for the following areas.
(1) Super-LSI technology and electronic device: field and thermal emitters, TiN as diffusion barrier in metallization to Si semiconductor, resistive thermoconductive humidity sensor with TaN film and Josephson turnel junction with NbN film.
(2) Energy related materials: solar-selective surface with ZrC thin film, emitter for thermionic generator, electrodes (ZrB2 and HfB2) for MHD generator and first wall coated with TiC or TiB2 film for tokamak.
