Tracking Control for Wafer Transfer Robot by Gain Scheduling

Abstract

In this paper, we discuss trajectory tracking control of a wafer transfer robot. In order to establish an accurate model that is required in high performance control of the robot, we derive weighting functions from the models obtained by system identification at several attitudes. The weighting functions will be interpolated between the robot’s operating range. We design a controller for such model by gain scheduling techniques. Finally, we demonstrate numerical simulation of tracking control.