Journal of The Society of Instrument and Control Engineers
Online ISSN : 1883-8170
Print ISSN : 0453-4662
ISSN-L : 0453-4662
Technology Report
Coaxial Distance Measurement Using a Lateral Shear Interferometer with a Phase Grating
Eri FUJII, Masashi FURUYA, Hisatoshi FUJIWARA
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Keywords: phase grating, lateral shear interferometer, distance measurement
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2024 Volume 63 Issue 3 Pages 190-193

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