Journal of The Society of Instrument and Control Engineers
Online ISSN : 1883-8170
Print ISSN : 0453-4662
ISSN-L : 0453-4662
Survey of Ultimately Fine Measurement by SPM
Masatoshi ONO
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Keywords: scanning tunneling microscope, scanning probe microscope, atomic force microscope, STM
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1992 Volume 31 Issue 1 Pages 182-185

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