Journal of The Society of Instrument and Control Engineers
Online ISSN : 1883-8170
Print ISSN : 0453-4662
ISSN-L : 0453-4662
Mechanism and Performance Limit of Electrostatic Microactuators
Hiroshi TOSHIYOSHI
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Keywords: microactuator, micromachine, electrostatic actuation, displacement, temporal response, resonant frequency
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2003 Volume 42 Issue 1 Pages 18-23

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