Journal of The Society of Instrument and Control Engineers
Online ISSN : 1883-8170
Print ISSN : 0453-4662
ISSN-L : 0453-4662
Present Status and Perspective on MEMS-Based Devices and Systems for Information Technology
Kohki NODA
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Keywords: information processing, information technology, robotics, measurement/instrumentation, medical, NEMS
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2003 Volume 42 Issue 1 Pages 56-59

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