SICE Annual Conference Program and Abstracts
SICE Annual Conference 2004
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Petri Net-Based Design of Modular Supervisors for Remotely Human Control Systems
*JIN-SHYAN LEEMENG-CHU ZHOUPAU-LO HSU
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Pages 14

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Abstract
In an Internet-based control system, particular human operations may violate desired requirements. This paper extends the remote supervisory scheme in [5] to a modular one so as to reduce the supervisor synthesis complexity. Also, remote issued commands are guaranteed to meet specifications. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach.
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© 2004 SICE
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