Application of Pressure Differentiator Using Isothermal Chamber to Isolation Table

Tomonori Kato; Kenji Kawashima; Michio Yanagisawa; Toshiharu Kagawa

doi:10.11499/sicep.2004.0_19_2

SICE Annual Conference 2004

DOI https://doi.org/10.11499/sicep.2004.0_19_2

会議情報

主催: The Society of Instrument and Control Engineers

共催: The IEEE Industrial Electronics Society, The IEEE Robotics and Automation Society, The IEEE Control Systems Society, The IEEE Systems, Man and Cybernetics Society, The Instrumentation, Systems, and Automation Society

Application of Pressure Differentiator Using Isothermal Chamber to Isolation Table

*Tomonori Kato, Kenji Kawashima, Michio Yanagisawa, Toshiharu Kagawa

著者情報

キーワード: Pressure Control, Cascade Control, Isothermal Chamber

会議録・要旨集フリー

p. 19

詳細

抄録

In this paper, the mechanism of a pressure differentiator, applying the principle of isothermal chamber and slit type laminar flow element, is explained. Then, the pressure differentiator is applied to the pressure control of an isolation table, as constituting a minor feed back, in order to compensate the non-linearity of a servo valve and realize an isolation table with higher gain and lower energy consumption.

責任著者(Corresponding author)

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