Dynamic Calibration of Laminar Flow Sensor for Gases

Tatsuya Funaki; Kenji Sengoku; Kenji Kawashima; Toshiharu Kagawa

doi:10.11499/sicep.2004.0_19_4

SICE Annual Conference 2004

DOI https://doi.org/10.11499/sicep.2004.0_19_4

Conference information

Host: The Society of Instrument and Control Engineers

Co-host: The IEEE Industrial Electronics Society, The IEEE Robotics and Automation Society, The IEEE Control Systems Society, The IEEE Systems, Man and Cybernetics Society, The Instrumentation, Systems, and Automation Society

Dynamic Calibration of Laminar Flow Sensor for Gases

*Tatsuya Funaki, Kenji Sengoku, Kenji Kawashima, Toshiharu Kagawa

Author information

Keywords: Flow measurement, Laminar flow sensor, Osillatory flow

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 19

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Abstract

In this paper, we examined theoretically and experimentally the dynamic characteristics of a laminar flow sensor for gases which we developed. We evaluated the influence of inlet region and the linear characteristic. And we confirmed the flow sensor can be measured oscillatory flow up to 50[Hz] and the laminar flow sensor has phase-lead characteristic.

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