Characteristics of Constant-Temperature Type Micro Thermal Flow Sensor

Koichi Igarashi; Tatsuya Funaki; Kenji Kawashima; Toshiharu Kagawa

doi:10.11499/sicep.2004.0_19_5

SICE Annual Conference 2004

DOI https://doi.org/10.11499/sicep.2004.0_19_5

Conference information

Host: The Society of Instrument and Control Engineers

Co-host: The IEEE Industrial Electronics Society, The IEEE Robotics and Automation Society, The IEEE Control Systems Society, The IEEE Systems, Man and Cybernetics Society, The Instrumentation, Systems, and Automation Society

Characteristics of Constant-Temperature Type Micro Thermal Flow Sensor

*Koichi Igarashi, Tatsuya Funaki, Kenji Kawashima, Toshiharu Kagawa

Author information

Keywords: Flow Measurement, Electro Calorimetric Flow Sensor, Micromachined Sensor

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 19

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Abstract

We have developed a new thermal type micro flow sensor. We have achieved the sensor structure simple by introducing the constant-temperature operation. Prototype sensor sized 5 * 5 mm has been fabricated using MEMS technology. In the steady flow condition, the sensor has good linearity. To realize better dynamic characteristic, we have to analyze numerically and experimentally moreover.

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