3-D Profiling of a Transparent Film using White-Light Interferometry

Katsuichi Kitagawa

doi:10.11499/sicep.2004.0_37_2

SICE Annual Conference 2004

DOI https://doi.org/10.11499/sicep.2004.0_37_2

Conference information

Host: The Society of Instrument and Control Engineers

Co-host: The IEEE Industrial Electronics Society, The IEEE Robotics and Automation Society, The IEEE Control Systems Society, The IEEE Systems, Man and Cybernetics Society, The Instrumentation, Systems, and Automation Society

3-D Profiling of a Transparent Film using White-Light Interferometry

*Katsuichi Kitagawa

Author information

Keywords: interferometry, surface profiler, film thickness measurement

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 37

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Abstract

In the White-Light Interferometry, two peaks appear in the interferogram if a transparent film exists on the surface to be measured. An algorithm has been developed that can detect the peak positions, and a Film Profiler” has been put into practical use

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