3-D Profiling of a Transparent Film using White-Light Interferometry

Katsuichi Kitagawa

doi:10.11499/sicep.2004.0_37_2

SICE Annual Conference 2004

DOI https://doi.org/10.11499/sicep.2004.0_37_2

会議情報

主催: The Society of Instrument and Control Engineers

共催: The IEEE Industrial Electronics Society, The IEEE Robotics and Automation Society, The IEEE Control Systems Society, The IEEE Systems, Man and Cybernetics Society, The Instrumentation, Systems, and Automation Society

3-D Profiling of a Transparent Film using White-Light Interferometry

*Katsuichi Kitagawa

著者情報

キーワード: interferometry, surface profiler, film thickness measurement

会議録・要旨集フリー

p. 37

詳細

抄録

In the White-Light Interferometry, two peaks appear in the interferogram if a transparent film exists on the surface to be measured. An algorithm has been developed that can detect the peak positions, and a Film Profiler” has been put into practical use

責任著者(Corresponding author)

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