Precise Position Control of a Linear Stage Integrated with an Inchworm Type Actuator

Chanwoo Moon; Sungho Lee; J.K. Chung; Hagyoeng Sung

doi:10.11499/sicep.2004.0.41.1

SICE Annual Conference 2004

DOI https://doi.org/10.11499/sicep.2004.0.41.1

Conference information

Host: The Society of Instrument and Control Engineers

Co-host: The IEEE Industrial Electronics Society, The IEEE Robotics and Automation Society, The IEEE Control Systems Society, The IEEE Systems, Man and Cybernetics Society, The Instrumentation, Systems, and Automation Society

Precise Position Control of a Linear Stage Integrated with an Inchworm Type Actuator

*Chanwoo Moon, Sungho Lee, J.K. Chung, Hagyoeng Sung

Author information

Keywords: Inchworm actuator, Stage, I/Q heterodyne interferometer

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Pages 41

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Abstract

A Piezo-electric inchworm type actuator for an ultra precision linear stage is proposed. The linear stage is integrated with the developed inchworm actuator, so it has a compact size, and it provides long stroke fast motion with a precise positional accuracy. We use an I/Q heterodyne interferometer system and develop a counting method to measure its position.

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