Picogram mass sensor using microcantilever

Hayato Sone; Yoshinori Fujinuma; Takashi Hieida; Takafumi Chiyoma; Haruki Okano; Sumio Hosaka

doi:10.11499/sicep.2004.0.81.1

SICE Annual Conference 2004

DOI https://doi.org/10.11499/sicep.2004.0.81.1

会議情報

主催: The Society of Instrument and Control Engineers

共催: The IEEE Industrial Electronics Society, The IEEE Robotics and Automation Society, The IEEE Control Systems Society, The IEEE Systems, Man and Cybernetics Society, The Instrumentation, Systems, and Automation Society

Picogram mass sensor using microcantilever

*Hayato Sone, Yoshinori Fujinuma, Takashi Hieida, Takafumi Chiyoma, Haruki Okano, Sumio Hosaka

著者情報

会議録・要旨集フリー

p. 81

詳細

抄録

A microsensor with a picogram mass sensitivity has been developed using a harmonic vibration of microcantilever. The mass change of the adsorbed molecules on the cantilever was measured by the resonance frequency shift. We constructed a prototype vibrator sensor using a piezoresistive cantilever. As experimental results, a mass sensitivity of 0.32 pg/Hz was obtained from water molecular adsorption in air.

責任著者(Corresponding author)

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