抄録
In this paper, we present a vel driving method of on-chip probe for the measurement of the mechanical properties of floating cells whose size is tens micrometers in diameter. The measurement of cellular mechanical properties is performed by the assistance with a force sensor and an on-chip probe in a microfluidic chip. The key for the measurement method is how to actuate the on-chip probe whose thickness is tens micrometers. We propose the “Direct-Outer-Drive (D-O-D) mechanism” to connect the on-chip probe and the external actuator placed outside of the chip. The D-O-D mechanism is composed of two bonded silicon layers with different thickness, which are fabricated for the thin tip and the thick contact point, respectively. By using the D-O-D mechanism, we succeed in measuring reactive force of the cells when they are deformed by the on-chip probe.
