サーボ系の機械振動抑制FIRフィルタの自動調整

抄録

Servo systems are widely used in various position control applications from general industry machine to semiconductor machine. In these systems, it is usually difficult to adjust the controller to high response, because there are mechanical vibrations caused by mechanical resonances and phase delay in high frequency domain. This paper proposes an auto-tuning method of vibration suppression FIR filter using adaptive FIR filter. The auto-tuning method is performed by setting coefficients of adaptive FIR filter outside of control loop to vibration suppression FIR filter in turn. Simulation and experimental results show that the proposed method can suppress the vibration, and can improve stability and response of servo system. Thus, the proposed method can provide auto-tuning of vibration suppression filter under various operating conditions.