In recent years, the performance of rotary control mechanisms has been further improved. To achieve this, it is necessary to detect the rotation angle with high accuracy and to grasp the time-dependent variation of the bearing mechanism. By realizing runout detection in the XY direction perpendicular to the axis of rotation, shaft deterioration can be ascertained in advance and the life of the bearing mechanism can be estimated. In addition, by enabling runout detection in the Z-axis direction, deviation in the Z direction when a large workpiece is placed on the machine tool can be detected and machining errors can be compensated, enabling high-precision machining. This paper reports on research into high-precision detection technology for rotation angle and axis runout in the three directions of X, Y, and Z using a gear-type magnetic rotary encoder.
