Abstract
This paper describes a differential-gap varying method for measuring the dielectric constants and thicknesses of thin films.
In this method, an electrode assembly of two high tension circular plate electrodes is used. The electrodes are arranged symmetically parallel to a grounded plate electrode that is jointly moved by a micrometer head.
Many of the errors of the conventional method are eliminated in the method used here.
It is also shown that this method serves as an experimental tool for simultaneous determination of the permitivity and the thickness of a film theoretically as thick as even 0.1μm (1000Å) with a high degree of accuracy.
In our experiments, the data for the thickness and dielectric constant of a polyester film are found to be consistent and in reasonable agreement.
