Abstract
Many precise positioning techniques which utilize a high stability of a laser wavelength have been realized by various methods. But there is no little gap between these methods and the stability of the laser wavelength.
In this paper we use a method of measuring an analogous luminous intensity of a laser interference fringe which is a sin function of a corner cube (piston) displacement. We made a displacement control system which consisted of a laser interferometer and an electrohydraulic servo mechanism (double nozzle flapper valve and piston cylinder), and examined it experimentally.
In this experiment, we found that the system has a very good performance especially near holizontal axis of the sin function. And we confirmed a possibility of realization of control precision within 0.0008μm.
