Transactions of the Society of Instrument and Control Engineers
Online ISSN : 1883-8189
Print ISSN : 0453-4654
ISSN-L : 0453-4654
A Direction Sensing Technique of a Reference Point by Using Cross-Hair Diffraction Beam
Masafumi ITOKazuhiro HANEFumio MATSUDAYoshiki UCHIKAWAShuzou HATTORI
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1991 Volume 27 Issue 3 Pages 368-370

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Abstract
We describe a technique for measuring the direction of a reference point easily and accurately. In the method, cross-hair diffraction beam, corner cube and an XY-scanner driven by piezo stacks are used. The accuracy for angular detection was about 10μ rad.
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© The Society of Instrument and Control Engineers (SICE)
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