制振制御を加味した負荷無反応形サーボ系

抄録

To meet the increasing demands for the more refined semiconductor design rules and the more enhanced optical disk memory density, a very fine motion control based upon numerical control technology such as under submicron meter encoder feedback is required. The first major subject is how to keep a desired motion clear of elasticity of feeding mechanism. The second one is how to keep a load insensitive motion free from change of load and influence of disturbance. In this paper, a new damping compensator is derived from adopting both input side and output side detecting signals of the elastic feeding mechanism, which are processed through an each element being its relative degree equal to zero and are combined to generate a feedback information. Then, by using the compensator dominating the motion characteristics of the elastic member, a servomechansim with a position, a velocity and a acceleration control loop is organized and comes to show load insensitivity. The paper describes design methods of the proposed compensator and the servomechanism, and also shows the effectiveness by computer simulations.