Abstract
This paper discribes a high precision optical profilometer. The apparatus is composed of a modified Linnik type interference microscope. In measurement, heights of a reference mirror and a sample are controlled to get maximum resolution with PZT actuators. With the control, the measured profiles are not affected by the roughness of the reference mirror.
Principles of the measurement are briefly described. And using various samples, the abilities of this apparatus are checked on reproducibility, internal vibration isolation function with optical differential method, and resolution.
