A Study of Profile Measurement with Zone-Plate Interferometer on Ultra Precision Machines

Fumio KOBAYASHI; Takashi NOMURA; Kazuo YOSHIKAWA; Hatsuzo TASHIRO; Masane SUZUKI; Masao USUKI

doi:10.9746/sicetr1965.28.164

Fumio KOBAYASHI, Takashi NOMURA, Kazuo YOSHIKAWA, Hatsuzo TASHIRO, Masane SUZUKI, Masao USUKI

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Keywords: zone-plate interferometer, on-machine measurement, profile measurement

JOURNAL FREE ACCESS

1992 Volume 28 Issue 1 Pages 164-165

DOI https://doi.org/10.9746/sicetr1965.28.164

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Abstract

A proposed measurement is based on a zone-plate interferometry and secure a considerably high degree of stability for fringes even with the vibration of the machine or the disturbance of the air. The experiment shows that the zone-plate interferometer is suitable for on-machine profile measurement.

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