Abstract
In the sensor fusion system using multiple sensors, space difference between each sensors often cause contradiction of data. The method of multiple parameter detection from a sensor avoids the contradiction. In this paper, feasibility of the method is studied as multiple parameter detection from a semiconductor gas sensor.
Output of gas sensor is influenced by temperature and humidity. Ambient temperature variation is compensated using separate temperature sensor at present. Surface temperature of the sensor device is kept hot for quick response. Cooling due to wind can change the heated surface temperature. We propose a method of temperature detection of sensor device by measuring admittance of the gas sensor.
Simple physical model is presented which describes conductance vs. capacitance characteristics, and it is proven by experimental, results. Calibration for temperature compensation can be simplified by this model. Disagreements with experimental results are discussed, and experimental phenomenon on frequency dependency and nonlinearity of capacitance both agreed with theoretical phenomenon qualitatively.
The mobility of the sensor depends on not reducing gas but humidity. Humidity can be sensed by utilizing the model, if the temperature is known.
