Abstract
A numerical method to remove the measurement error which is originated in the finitely extended tip of the probe used in scanning probe microscopy is proposed. The tip-effect is removed with a nonlinear iterative inversion algorithm in the proposed method. The method is applied to a contact instrument for surface profile measurement. The center line average height of the roughness curve of a steel specimen is recovered by the ratio of 0.02∼0.03 (2∼3%) by the proposed method. The regularization of the inverse system and the accuracy in the proposed method are discussed.
