Measurement of Polished Curved Surfaces with Tele-Microscope

Kintaro NISHIMURA; Hidekazu MIYAUCHI; Kenryo FUZISE; Toshiaki OTANI; Saburo OKADA; Hiroshi YOKOGAWA

doi:10.9746/sicetr1965.30.1260

Transactions of the Society of Instrument and Control Engineers

Online ISSN : 1883-8189
Print ISSN : 0453-4654
ISSN-L : 0453-4654

Measurement of Polished Curved Surfaces with Tele-Microscope

Kintaro NISHIMURA, Hidekazu MIYAUCHI, Kenryo FUZISE, Toshiaki OTANI, Saburo OKADA, Hiroshi YOKOGAWA

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Keywords: tele-microscope, polished surface, scratch detection

JOURNAL FREE ACCESS

1994 Volume 30 Issue 10 Pages 1260-1262

DOI https://doi.org/10.9746/sicetr1965.30.1260

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Abstract

Polished curved surfaces were measured with a QUESTAR type tele-microscope. Introduction of image processing techniques enabled us to detect scratches on the polished surface on-line.

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