Transactions of the Society of Instrument and Control Engineers
Online ISSN : 1883-8189
Print ISSN : 0453-4654
ISSN-L : 0453-4654
A Measuring Method for Chucking and Release Time in an Electrostatic Chuck
Tatsuya KUNIOKA, Nobuo SHIMAZU
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Keywords: electrostatic chuck, chucking time, release time, capacitance method
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1994 Volume 30 Issue 6 Pages 729-731

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Abstract
A capacitance method was developed to measure chucking and release time in an electrostatic chuck. This method is more practical than the conventional method, and we can obtain both chucking and release time in one measurement.
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© The Society of Instrument and Control Engineers (SICE)
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