Abstract
A novel switched-capacitor bridge for high speed and accuracy capacitance measurement is developed based on a two-step quantization. The first coarse quantization is performed by the charge-balancing M-bit A-D converter. The second fine quantization interpolates the first quantization into K bits by the single-slope A-D converter. An error analysis shows that the 12-bit resolution can be expected by MOS IC form. A prototype bridge using discrete components has confirmed the principles of operation.