抄録
Force measurement of the micro objects is very important for micromanipulation. For high accuracy, stiffness of the finger tip can be reduced for force measurement. However, it is not suitable for manipulation. So we consider to evaluate the stress on the micro structure to measure the force. Advantage of force measurement based on stress information comes up when the structure is miniaturized. This can be shown by the scaling analysis. From this reason, we propose a new force measurement and micromanipulation method using the Laser Raman Spectrophotometer. We design a micro gripper that employs the proposed force measurement method. We show experimental results of force measurement with the analytical evaluation to explain the effectiveness of the proposed system.
