Transactions of the Society of Instrument and Control Engineers
Online ISSN : 1883-8189
Print ISSN : 0453-4654
ISSN-L : 0453-4654
Optical Heterodyne Interferometer Using the Intermode Beat of a Two-mode Stabilized He-Ne Laser
Fumio MURAKAMIYoichi OMURATatehisa OHTA
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1998 Volume 34 Issue 9 Pages 1133-1138

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Abstract
High-resolution heterodyne Michelson interferometer has been built using the intermode beat of a two-mode stabilized He-Ne laser. To facilitate the precision phase measurement, the high-frequency beat signal of 724MHz is down-converted to the intermediate frequency by means of single sideband suppressed carrier modulation technique. The digital phasemeter based on sampling the saw-tooth wave of the intermediate frequency provides nanometer resolution. In addition, periodic nonlinearity error caused by leakage of the polarization components in the interferometer optics is evaluated.
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