Abstract
In the paper, we will propose some new idea regarding posture sensor.
This proposal is a measurement technique of the posture by combining the detection method of discrete liquid level by the point Pt electrode with the liquid level measurement method by square pole Si electrode that has already been proposed by authors'. Using these techniques, we succeeded in improving the precision and expansion of the range of the measurement.
First of all, we will explain the simulation technique to examine the mounting of the square pole Si electrode. Next, we will show calibration experiment method of square pole Si electrode, posture measurement, temperature dependency experiment, and the addition function of the attitude measuring method that uses liquid film behavior.
As a result of these experiments, we came to the conclusion that our proposal has validity.
