Abstract
The unsteady flow rate measurement of gases is very important in various industrial fields. In this paper, we examined theoretically and experimentally the static and dynamic characteristics of a laminar flow meter for gases. We confirmed the flow meter can measure oscillatory flow lip to 50[Hz] and the laminar flow meter has phase-lead characteristic theoretically and experimentally. The laminar flow meter with high speed response which is calibrated dynamically can be used for precise pressure control circuits.
